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Semiconductor-Related Materials - Hitachi Chemical …
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Semiconductor-Related Materials - Hitachi Chemical …
Website URL:
http://www.hitachi-chemical.com/products_srm_index.htm
Category:
Plastic Stock
CMP Slurry FEOL Application Hitachi Chemical is a leading company of CeO2 slurry for STI. "GPX" is excellent for polishing and it is suitable for finer patterns.
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